Wide operating range
Wide operating range (W2.7m x H1.6m) offers to meet various system layout.
The compact rotation diameter (520mm) helps to minimize the equipment footprint.
330 WPH (*) of transfer speed contributes to improve the equipment throughput.
*: Vacuum chuck type
- Model name
- Vertical articulated type
- Number of Axes
- 0.5kg/arm (including E/E)
- Cleanliness (*)
- Clamp type: ISO Class 3 (ISO-14644)
Vacuum chuck type: ISO Class 1 (ISO14644)
(*) Measured at the wafer transferring surface.
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